References to silicon carbide heating factors exist within the early twentieth century after they were being produced by Acheson's Carborundum Co. inside the U.S. and EKL in Berlin. Silicon carbide available elevated working temperatures in contrast with metallic heaters. CMP of single-crystal SiC was 1st claimed by Zhou [22] in https://www.quora.com/profile/Trevor-Flatcher-2/The-Versatile-Applications-of-Silicon-Carbide-Special-Ceramics-in-Modern-Industries-Silicon-carbide-SiC-special-ceram